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HIGH POWER UV LIGHTSOURCE SYSTEMS

B&A offers a variety of high power, collimated UV Lightsources and UV Flood Exposure Systems. These systems are used for  fine line patterning Flood Exposure as well as for enhancement of many UV photolithography processes employed by the Microelectronics Industry.
These UV systems are designed for production and R&D applications. Near, Mid, and Deep UV systems are available with a variety of standard and optional features including beam sizes to 18" (450mm) with up to 5,000W capability.

The System's Optics...
The system's UV optics employ a proven, high performance optic train that include an elliptical reflector, dielectric heat removing primary and secondary mirrors, a multi-element optical integrator system and collimating optics. The system's optical integrator system produces uniformity and non-coherent radiation that virtually eliminates the detrimental effects of diffraction. These high intensity systems can resolve fine structures even in thick photosensitive materials.

 250mm Sq LS System  LS-150-20 UV Lightsource  LS-250-35C2  300mm Sq LS
                      Large Area - High Power Lightsources  
 Features and Options  Typical Applications
  • Uniform, Lightsource Systems
  • Near, Mid and Deep UV Versions
  • 200W to 5,000W Systems
  • Intensity Controlling Powersupply Systems
  • Shutter Controller
  • Hi-Rel, Low Maintenance Design
  • Excellent Documentation

 
  • Photoresist Patterning
  • Photoresist Stabilization
  • Edge Bead Exposure
  • Photoresist Modification
  • Image Reversal
  • Polymer Research
  • PCM Processes

TYPICAL TECHNICAL SPECIFICATIONS
   Near UV Systems  Deep UV Systems
  Available Beam Sizes
 100mm to 450mm
  100mm to 300mm
 Beam Divergence
 2.6 deg. to < 1.2 deg.
  2.6 deg. to < 1.2 deg.
 Beam Uniformity
 Diameters +/- 5%
 Squares +/- 6%
 Diameters +/- 5%
 Squares +/- 6%
  Beam Spectrum
 340nm - 450nm
 220nm - 260nm
 240nm - 275nm
 Intensity @ 500W (100mm Dia.)
 40 mW/cm2 (UV365)
 85 mW/cm2 (UV400)
 17 mW/cm2 (DUV220)
 20 mW/cm2 (DUV260)
 Intensity @ 1,000W (100mm Dia.)
 77 mW/cm2 (UV365)
 170 mW/cm2 (UV400)
 30 mW/cm2 (DUV220)
 36 mW/cm2 (DUV260)
 Intensity @ 2,000W (100mm Dia.)
 150 mW/cm2 (UV365)
 320 mW/cm2 (UV400)
 60 mW/cm2 (DUV220)
 70 mW/cm2 (DUV260)

SHORT OF FUNDS... TRY OUR "LEASE-TO-BUY" OPTION

For additional technical information and pricing contact us at...

Tel:  (408) 988-5861
Fax: (408) 249-5037 or (408) 982-9513
Email: sales@bachur-n-associates.com